| 摘要 |
As a substrate (m) is pressurized, a frame (34) slides to a base plate (33) side. Next, along with a movement of the frame (34), a viscous body is compressed by imprint means (35) in order to develop uniform pressure inside the viscous body. As a result, the viscous body can be used to uniformly and tightly press all parts of imprint means (35) on the substrate (m). Thus, a uniform distribution of contact planar pressure from imprint means (35) is received by the substrate (m) without the need of applying excessive pressure or planar pressure on the substrate (m). |
