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发明名称
摘要
Embodiments of the invention provide a device with a multiple gates. Stress material within recesses of a device body metal gate may cause a stress in channel regions of the device, thereby improving performance of the device.
申请公布号
JP5461014(B2)
申请公布日期
2014.04.02
申请号
JP20080542489
申请日期
2006.12.07
申请人
发明人
分类号
H01L21/336;H01L21/8238;H01L27/092;H01L29/78
主分类号
H01L21/336
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