曝光装置及元件制造方法,申请号TW093120588-传众专利搜索

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发明名称	曝光装置及元件制造方法
摘要
申请公布号	TWI433209	申请公布日期	2014.04.01
申请号	TW093120588	申请日期	2004.07.09
申请人	尼康股份有限公司日本	发明人	长坂博之
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人	桂齐恒台北市中山区长安东路2段112号9楼;阎启泰台北市中山区长安东路2段112号9楼
主权项
地址	日本

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