半导体制程供气装置,申请号TW102221224-传众专利搜索

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发明名称	半导体制程供气装置
摘要
申请公布号	TWM475695	申请公布日期	2014.04.01
申请号	TW102221224	申请日期	2013.11.13
申请人	技鼎股份有限公司新竹市光复路2段2巷47号4楼	发明人	林武郎;郑煌玉;方建利;陈世敏;刘又玮;范钊杰
分类号	H01L21/67	主分类号	H01L21/67
代理机构		代理人	林志青台北市信义区松隆路102号18楼之1
主权项
地址	新竹市光复路2段2巷47号4楼

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