一种化学气相沉积设备及其气体扩散装置,申请号TW100143088-传众专利搜索

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发明名称	一种化学气相沉积设备及其气体扩散装置
摘要
申请公布号	TWI432602	申请公布日期	2014.04.01
申请号	TW100143088	申请日期	2011.11.24
申请人	财团法人金属工业研究发展中心高雄市楠梓区高楠公路1001号	发明人	吴奕达;李书锋;吴春森
分类号	C23C16/54;C23C16/455	主分类号	C23C16/54
代理机构		代理人	陈启舜高雄市苓雅区中正一路284号12楼
主权项
地址	高雄市楠梓区高楠公路1001号

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