发明名称 Composite substrate and method for manufacturing the same
摘要 The composite substrate is a substrate used to manufacture an acoustic wave device, and includes a support substrate, a piezoelectric substrate, and a adhesive layer with which the support substrate and the piezoelectric substrate are bonded to each other. In the composite substrate, assuming that a surface of the piezoelectric substrate that is bonded to the support substrate is defined as a first surface and a surface at the side opposite to the first surface is defined as a second surface, the piezoelectric substrate is formed such that the first surface is inside the second surface when the first surface is projected onto the second surface in a direction perpendicular to the second surface. In other words, the composite substrate has an outer peripheral surface that is formed such that the circumference thereof increases toward the top surface of the piezoelectric substrate.
申请公布号 US8686622(B2) 申请公布日期 2014.04.01
申请号 US201013386854 申请日期 2010.07.21
申请人 KOBAYASHI HIROKI;HORI YUJI;IWASAKI YASUNORI;NGK INSULATORS, LTD. 发明人 KOBAYASHI HIROKI;HORI YUJI;IWASAKI YASUNORI
分类号 H01L41/09;H01L41/22 主分类号 H01L41/09
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