| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus or manufacturing method for an organic EL device having high productivity or high operating rate by being capable of high precision vapor deposition while reducing the deflection of a substrate and mask or capable of downsizing a transport chamber and by disposing a drive unit, etc. on the atmospheric air side to reduce the occurrence of dust and gas in a vacuum.SOLUTION: In the present invention, an alignment of a substrate and a mask in a vacuum chamber is performed while being suspended as a hanging body provided with the substrate or the mask. When an evaporation material is deposited on the substrate, a contact part of the hanging body is moved to raise the handing body vertically and then the hanging body is transported into the vacuum chamber, set at a positioning position, a transport contact part between the hanging body contact part of the hanging body and the hanging body contact part of a transport means used for transportation is separated, and the alignment is performed thereafter. |
