发明名称 STRUCTURES AND DEVICES INCLUDING A TENSILE-STRESSED SILICON ARSENIC LAYER AND METHODS OF FORMING SAME
摘要 Structures including a tensile-stressed silicon arsenic layer, devices including the structures, and methods of forming the devices and structures are disclosed. Exemplary tensile-stressed silicon arsenic layer have an arsenic doping level of greater than 5 E+20 arsenic atoms per cubic centimeter. The structures can be used to form metal oxide semiconductor devices.
申请公布号 US2014084341(A1) 申请公布日期 2014.03.27
申请号 US201314018345 申请日期 2013.09.04
申请人 ASM IP HOLDING B.V. 发明人 WEEKS KEITH DORAN
分类号 H01L29/267;H01L21/02 主分类号 H01L29/267
代理机构 代理人
主权项
地址