| 摘要 |
A substrate member includes a substrate and a plurality of chip regions formed on the substrate across a scribe line. Each of the plurality of chip regions includes a first region that has contact with the scribe line and in which a plurality of first pattern elements are formed, and a second region that is surrounded by the first region and in which a plurality of second pattern elements are formed. A minimum value of a size of the first pattern elements is greater than a minimum value of a size of the second pattern elements and/or a minimum value of an interval between adjacent first pattern elements is greater than a minimum value of an interval between adjacent second pattern elements. |
