| 摘要 |
PROBLEM TO BE SOLVED: To enhance the holding power of a workpiece holding material for holding a workpiece, eliminating the need of buff processing, preventing penetration of moisture, e.g. a polishing liquid, from the front and/or back surface and increasing the strength of the front and back surfaces.SOLUTION: A workpiece holding material for holding a workpiece has a foam layer 2, and the surface 2a-1 of the foam layer 2, serving as a holding surface holding the workpiece, is smoother than the surface of an original foam layer formed by applying a resin solution to a substrate 1 and wet-coagulating or has a maximum (Wcmax) of the height of waviness curve factors of 3 μm or smaller. |
