发明名称 |
PRESSURE REGULATOR, POLISHING APPARATUS HAVING THE PRESSURE REGULATOR, AND POLISHING METHOD |
摘要 |
A pressure regulator includes: a pressure-regulating valve configured to regulate pressure of a fluid supplied from a fluid supply source; a first pressure sensor configured to measure the pressure regulated by the pressure-regulating valve; a second pressure sensor located downstream of the first pressure sensor; a PID controller configured to produce a correction pressure command value for eliminating a difference between a pressure command value and a pressure value of the fluid measured by the second pressure sensor; and a regulator controller configured to control operation of the pressure-regulating valve so as to eliminate a difference between the correction pressure command value and a pressure value of the fluid measured by the first pressure sensor. |
申请公布号 |
US2014087629(A1) |
申请公布日期 |
2014.03.27 |
申请号 |
US201313948238 |
申请日期 |
2013.07.23 |
申请人 |
EBARA CORPORATION |
发明人 |
TAKAHASHI NOBUYUKI;MARUYAMA TORU |
分类号 |
B24B37/34;B24B37/005 |
主分类号 |
B24B37/34 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|