| 摘要 |
Methods for forming a coating over a surface are disclosed. A method includes directing a first source of barrier film material toward a substrate in a first direction at an angleθrelative to the substrate, whereinθis greater than about 0° and less than about 85°. Additionally, a method of depositing a barrier film over a substrate includes directing a plurality of N sources of barrier film material toward a substrate, each source being directed at an angleθN relative to the substrate, wherein for eachθN,θis greater than about 0° and less than about 180°. For at least a first of theθN,θN is greater than about 0° and less than about 85°, and for at least a second of theθN,θN is greater than about 95° and less than about 180°. |
