| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern matching method, a method of generating a mask pattern, and a method of constructing a library, wherein pattern matching processing for the mask pattern is made more efficient.SOLUTION: A pattern matching method includes: a first matching step in which matching target outline information PL1-PL3 are matched with a plurality of outline information in a first hierarchy, by referring to a library where a common part of outlines of a plurality of registered matching pattern classified as the same group of a mask pattern is used as outline information A1 in a first hierarchy L1 and a non-common part of the outlines thereof is used as outline information B1-B3 in a second hierarchy L2; and a second matching step of determining that, when the matching is achieved in the first matching step, the matching target outline information are matched with a plurality of outline information in the second hierarchy related to the outline information in the first hierarchy and then are matched with a registered matching pattern corresponding to the outline information in the first and second hierarchies with which the matching target pattern is matched. |
