发明名称 METHODS FOR BONDING SUBSTRATES
摘要 Methods for bonding substrates, forming assemblies using the same, along with improved methods for refurbishing said assemblies are disclosed that take advantage of at least one channel formed in an adhesive utilized to join two substrates to improve fabrication, performance and refurbishment of the assemblies. In one embodiment an assembly includes a first substrate secured to a second substrate by an adhesive layer. The assembly includes a channel having at least one side bounded by the adhesive layer and having an outlet exposed to an exterior of the assembly.
申请公布号 WO2014046840(A1) 申请公布日期 2014.03.27
申请号 WO2013US56256 申请日期 2013.08.22
申请人 APPLIED MATERIALS, INC. 发明人 NARENDRNATH, KADTHALA RAMAYA;SHEELAVANT, GANGADHAR;AGARWAL, MONIKA;BHATNAGAR, ASHISH
分类号 H01L21/02;H01L21/20 主分类号 H01L21/02
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