发明名称 CONDUCTIVE THIN FILM
摘要 PROBLEM TO BE SOLVED: To provide a conductive thin film which can improve physical properties regardless of other configurations.SOLUTION: A conductive thin film 3 made of a perovskite oxide represented by the general formula ABOhas a vacancy group 8 made of a plurality of vacancies 7 that get together. The vacancy group 8 generates strains.
申请公布号 JP2014056717(A) 申请公布日期 2014.03.27
申请号 JP20120200917 申请日期 2012.09.12
申请人 UNIV OF TOKYO 发明人 IKUHARA YUUICHI;YAMAMOTO TAKEHISA;SHIBATA NAOYA;MIMUKAI YUKI;KOBAYASHI SHUNSUKE
分类号 H01B5/14;C01G23/00;C23C14/28;H01L21/28;H01L21/3205;H01L21/768;H01L23/532 主分类号 H01B5/14
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