| 摘要 |
PROBLEM TO BE SOLVED: To provide a film thickness measurement device that can prevent interference when a measuring head moves without limiting measuring range on a product board of the measuring head.SOLUTION: In an interference avoiding mode of head position adjustment means, a displacement sensor (22) measures a pre-determined measure point (P) of a product board (10), and a measuring head (23) is moved to a height direction so that distance in a height direction between the measuring head (23) and the measure point (P) becomes an interference avoiding value (N1) larger than a set value. |
