APPARATUS FOR CREATING AN ULTRAVIOLET LIGHT, AN EXPOSING APPARATUS INCLUDING THE SAME, AND ELECTRONIC DEVICES MANUFACTURED USING THE EXPOSING APPARATUS

摘要

An extreme ultraviolet ray generation device includes a base material supply unit, a laser irradiation unit, a light collection unit, and a guide unit. The base material supply unit supplies base material for generating extreme ultraviolet rays. The laser irradiation unit irradiates laser using the base material supplied from the base material supply unit and generates extreme ultraviolet rays. The light collection unit collects the extreme ultraviolet rays generated by the laser irradiation unit. The guide unit guides the base material to a position to which the laser is irradiated. The guide unit includes at least one gas spray hole for spraying gas between the base material supply unit and the position to which the laser is irradiated to form a gas curtain surrounding the base material. By doing so, it is possible to guide the base material to the exact position to which the laser is irradiated and prevent the light collection unit from being contaminated by particulates.