摘要 |
<p>An electrostatic transducer 100 comprises an electrically conductive backplane member 102 having an array of through apertures 112; a spacer member 104 disposed over the backplane member 102, the spacer member 104 having an array of holes (114, fig 1) therethrough, the holes (114, fig 2) each having a maximum lateral dimension less than twice a minimum lateral dimension; and a flexible electrically conductive membrane 106 disposed over the spacer member (104). The transducer is arranged in use to apply an electrical potential which gives rise to an attractive electrostatic force between the backplane member 102 and the membrane 106 thereby moving portions of the membrane 106 spanning said holes in the spacer member 104 towards said backplane member 102.</p> |