发明名称 FILM PEELING APPARATUS
摘要 <p>A film peeling apparatus is provided. The film peeling apparatus according to an embodiment of the present invention is a film peeling apparatus for peeling a film from a substrate in which the film is adhered on a surface. The film peeling apparatus comprises: a transfer module for transferring the substrate which is disposed in a perpendicular direction to the bottom surface; and a peeling module for peeling the film from the substrate transferred by the transfer module.</p>
申请公布号 KR20140036594(A) 申请公布日期 2014.03.26
申请号 KR20120102876 申请日期 2012.09.17
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 KIM, KYU BUM;PARK, JAE SEOK;PARK, JIN HAN;KIM, DONG SUL
分类号 H01L51/56 主分类号 H01L51/56
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