发明名称 Method of producing a porous dielectric element and corresponding dielectric element
摘要 A porous dielectric element is produced by forming a first dielectric and a second dielectric. The second dielectric is dispersed in the first dielectric. The second dielectric is then removed from the second dielectric by using a chemical dissolution. The removal of the second dielectric from the first dielectric leaves pores in the first dielectric. The pores, which are filled with air, improve the overall dielectric constant of the resulting dielectric element.
申请公布号 US7923820(B2) 申请公布日期 2011.04.12
申请号 US20100765840 申请日期 2010.04.22
申请人 STMICROELECTRONICS S.A. 发明人 JEANNOT SIMON;FAVENNEC LAURENT
分类号 H01L23/58 主分类号 H01L23/58
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