发明名称 |
Flow sensing device and packaging thereof |
摘要 |
There is described a flow sensing device having a semiconductor chip with a flow channel integrated therein and a sensing element positioned in the flow channel, and a package base attached to the semiconductor chip and allowing access to the two passage-openings of the flow channel from opposite sides of the package base. |
申请公布号 |
US8677818(B2) |
申请公布日期 |
2014.03.25 |
申请号 |
US201013255579 |
申请日期 |
2010.03.10 |
申请人 |
LANDSBERGER LESLIE M.;GRUDIN OLEG;SAED SALMAN;FROLOV GENNADIY;SENSORTECHNICS GMBH |
发明人 |
LANDSBERGER LESLIE M.;GRUDIN OLEG;SAED SALMAN;FROLOV GENNADIY |
分类号 |
G01F1/68 |
主分类号 |
G01F1/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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