自托持基板移除微机电系统（ＭＥＭＳ）之方法,申请号TW097116657-传众专利搜索

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发明名称	自托持基板移除微机电系统（ＭＥＭＳ）之方法
摘要
申请公布号	TWI430937	申请公布日期	2014.03.21
申请号	TW097116657	申请日期	2008.05.06
申请人	尚提克公司爱尔兰	发明人	保罗　帕沃斯;杰森　泰兰德;罗杰　富提;安德鲁　维拉;大卫　强斯登;奇亚　席维布鲁克
分类号	B81C1/00;B81C3/00;H01L21/67	主分类号	B81C1/00
代理机构		代理人	林志刚台北市中山区南京东路2段125号7楼
主权项
地址	爱尔兰

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