CHARGED PARTICLE BEAM DEVICE AND SAMPLE OBSERVATION METHOD

摘要

Provided is a charged particle beam device having a function for observing a sample in a gas atmosphere or a liquid state, wherein the purpose of the present invention is observing the circumstances of introducing liquid to a dried sample and the subsequent wetting thereof, and preventing scattering of the charged particle beam due to an excess of moisture entering into the area between a diaphragm and the sample. The present invention has a guide-in guide-out part (300) for guiding in and out a desired liquid or gas from a direction below or to the side of a sample (6), and has a configuration for emitting a primary charged particle beam to the sample (6) in a state where the sample (6) and a diaphragm (10) are not in contact.