TORSIONAL AND LATERAL STIFFNESS MEASUREMENT

摘要

A method for determining a spring constant/rigidity of a cantilever of a known shape, the method involving: measuring a resonance frequency of the cantilever in a plurality of static equilibrium positions in which the shape of the cantilever is different and determining a spring constant and/or rigidity of the cantilever using the measured frequencies. The resonance frequency may be at least one of a torsional and lateral resonance frequency.