| 摘要 |
PROBLEM TO BE SOLVED: To enhance the throughput.SOLUTION: A peeling system includes a first processing block, and a second processing block. The first processing block includes a first transport device, a peeling station, a first cleaning station, a pasting station, and a carry-out station. In the peeling station, a peeling device for peeling a superposed substrate, transported by a first transport device, into a first substrate and a second substrate by sliding the superposed substrate, while heating, along the joint surface of the first substrate and second substrate is installed. The second processing block includes a second cleaning station, a first delivery station, a carry-in/carry-out station, a second transport device, and a second delivery station. |
