发明名称 METHOD FOR PRODUCING A GRAPHENE NANO-RIBBON
摘要 A method for producing a graphene nanoribbon is disclosed. This production method includes the steps of: forming a crystalline catalytic metal layer composed of copper or nickel on a (110) plane or a (112) plane of a MgAl2O4 single-crystal substrate or a MgO single-crystal substrate, with a thickness of the crystalline catalytic metal layer being controlled and with a crystal orientation of the crystalline catalytic metal layer being controlled so that the crystal orientation coincides with a crystal orientation of the single-crystal substrate; forming a cap layer composed of an oxide on the formed catalytic metal layer; exposing a {111} plane of the crystalline catalytic metal layer as a side wall by etching a stack including the substrate, the catalytic metal layer, and the cap layer; and growing graphene selectively on the exposed side wall by chemical vapor deposition.
申请公布号 US2014080291(A1) 申请公布日期 2014.03.20
申请号 US201314025718 申请日期 2013.09.12
申请人 PANASONIC CORPORATION 发明人 NOZAWA KATSUYA;ODAGAWA AKIHIRO
分类号 H01L21/02 主分类号 H01L21/02
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