DESIGN OF TARGET CAPABLE OF INCREASING COOLING CAPABILITY AND DECREASING DEFLECTION AND DEFORMATION AND RELATED METHODS FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a sputtering target having increased cooling capability and being capable of decreasing deflection and deformation of a sputtering material.SOLUTION: The sputtering target comprises: a) a target surface element; b) a core backing element having a connecting surface connected to the target surface element; and c) at least one surface area shape increasing the effective surface area of the core backing element. An additive sputtering target comprises: a) an integrated target surface element and a core backing element, in which a target surface element and a core backing element have the same target material or material gradient; and b) at least one surface area shape. A method for forming a sputtering target comprises: a) providing a target surface element; b) providing a core backing element; c) providing at least one surface area shape increasing the effective surface area of a core backing plate; and d) connecting a surface target material to the connecting surface of a core backing material.