| 摘要 |
A film inspection apparatus for inspecting the state of a film includes a transfer unit that fixes the film in a flat state and that transfers the film, and includes an inspection unit that inspects the film transferred through the transfer unit. The transfer unit includes a carrier that is movable to a direction of the inspection unit, a tray in the carrier and for mounting the film thereto, and an adsorption unit that is in the carrier and that adsorbs the film to maintain the film mounted to the tray in the flat state. |
