DOUBLE PLATE USING IN SUBSTRATE PRESSING AND METHOD FOR PRESSING SUBSTRATE

摘要

The present invention relates to a double plate for pressing substrates and a method for pressing substrates. According to one embodiment of the present invention, provided is a double plate which is interposed between substrates when multiple substrates are pressed and comprises: a first plate: a second plate having different coefficient of thermal expansion from the first plate; and a bonding layer arranged between the first and the second plates, bonding the plates and curtailing mutual influence due to the thermal expansion of each plate. Also, a method for pressing substrates using the double plate is provided.