摘要 |
<p>A method of printing on a semiconductor wafer, a manufacturing method of a semiconductor device, and a semiconductor device which enable to easily perform positioning in the direction perpendicular to the top of the wafer and to easily identify the type of the wafer. The manufacturing method includes preparing a semiconductor wafer having a structure in which an element forming film is stacked on the top of an insulative transparent substrate, forming a light reflection film to reflect light for positioning on the bottom of the transparent substrate, irradiating a laser from the side at which the element forming film is disposed so as to form printed letters at the light reflection film, forming a semiconductor element at the element forming film, forming an interlayer dielectric film to cover the element forming film and the semiconductor element, forming a contact wire, and forming a metal wire on the interlayer dielectric film.</p> |