| 摘要 |
The present invention relates to a mapping unit for an FIMS loader and provides the mapping unit for the FIMS loader comprising: a support body rotatably installed in the left and right directions of a frame part on one surface of a side of an opening among a rear surface of the frame part, and rotating between an inspection position and a standby position wherein the inspection position is arranged in parallel with a semiconductor material accommodated in a container body, and the standby position is separated from the inspection position; an up and down moving power providing unit installed on one surface of the frame part and having one side connected to one side of the support body for providing up and down moving power for the support body; and mapping bars installed rotatably in the circumferential direction of the support body at one side of the support body for, in the case that the support body is located at the inspection position, inspecting a layering state of the semiconductor material accommodated in the container body. The present invention makes a support bar, from whose one side a pair of scan bars are formed in parallel with each other in the direction of one side, rotate in the direction of the semiconductor in the case that the support body rotates in the left and right directions of the frame part in the FIMS loader and, also, is arranged horizontally with the semiconductor material accommodated within an FOUP, thereby assures a work space, for maintaining each component of the FIMS loader, between a rear part of the FIMS loader, namely the frame part of the FIMS loader, and a semiconductor material take-out robot for taking the semiconductor material out from the FOUP. An angle between a pair of mapping bars for inspecting the semiconductor material despite a simple structure can also be constantly maintained. |
