Apparatus for evaporation of low temperature semiconductor material by electron beam impingement on the material and comprising means for draining electric charge from the material,申请号US19660524962-传众专利搜索

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发明名称	Apparatus for evaporation of low temperature semiconductor material by electron beam impingement on the material and comprising means for draining electric charge from the material
摘要
申请公布号	US3414655(A)	申请公布日期	1968.12.03
申请号	US19660524962	申请日期	1966.01.26
申请人	NATIONAL RESEARCH CORPORATION	发明人	ALLEN LLOYD R.
分类号	H01J37/305	主分类号	H01J37/305
代理机构		代理人
主权项
地址

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