| 摘要 |
The present invention relates to a manufacturing method for gallium oxide powders comprising: a step of mixing a solvent and a chelating agent; a step of heating and stirring the mixture, wherein the solvent and chelating agent are mixed, and dissolving the mixture; a step of obtaining a transparent solution by adding metal ion materials containing gallium (Ga) components to the mixture, wherein the chelating agent is dissolved, and agitating them; a step of controlling the pH of the transparent solution; a step of forming a polymerized complex by heating the transparent solution, wherein the pH is controlled, at a first temperature and performing polyesterification on them; a step of pulverizing the polymerized complex; and a step of forming Ga2O3 powders by heating the pulverized polymerized complex at a second temperature which is higher than the first temperature. The present invention produces Ga2O3 powders which exhibit excellent uniformity, have small particle size and are produced at low temperatures, and controls the particle size of the Ga2 O3 powders by adjusting pH in a manufacturing process. [Reference numerals] (AA) Particle size (nm) |
