| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for feeding purified ammonia capable, on an occasion for purifying and feeding, into a gallium nitride-based compound semiconductor process, ammonium, of inhibiting the stoppage or interruption of the feed of the purified ammonia into the gallium nitride-based compound semiconductor process due to feeding deficiency of ammonia.SOLUTION: The provided apparatus for feeding purified ammonia has a constitution wherein an industrial-grade crude ammonia including an oil content and one or more types of impurities selected from the group consisting of oxygen, carbon dioxide, and water is contacted with an oil content removal means so as to remove the oil content therefrom and further contacted with a catalyst including nickel as an effective component and a synthetic zeolite and wherein the purified ammonia from which the aforementioned impurities other than the oil content have been removed and a purified ammonia obtained by distilling or rectifying an industrial-grade crude ammonia can be alternately and selectively fed into a gallium nitride-based compound semiconductor process. |
