| 摘要 |
PROBLEM TO BE SOLVED: To provide a cold-cathode ionization gauge that prolongs lifetimes of a discharge induction member and an anode by suppressing sticking of a product material due to a discharge between the discharge induction member and a tip part of the anode and also suppressing consumption.SOLUTION: A cold-cathode ionization gauge including a cylindrical cathode 101, a rod-like anode 102 arranged in an internal space of the cylindrical cathode 101, magnetic means 103a, 103b of generating a discharge between the anode and the cathode by producing a magnetic field substantially orthogonal to an electric field between the anode and the cathode, and a discharge induction member 105 arranged in the cathode, includes a shield plate 2 which partitions the internal space of the cathode 101 into one space A2 in which a tip part of the anode 102 and the discharge induction member 105 are arranged and the other space A1. |
