| 摘要 |
PROBLEM TO BE SOLVED: To provide a light deflector having a high fracture limit.SOLUTION: A BOX layer (buried oxide layer) silicon oxide film 43 is formed on an outer peripheral frame part 17 formed of silicon, and a fixed frame part 11 formed of silicon is formed on the BOX layer silicon oxide film 43. Arms 14c and 14d formed of silicon are connected to the fixed frame part. The arms 14c and 14d are connected to a beam, and the beam is connected to a mirror. An upper end surface of a rear surface cavity which is located on a lower surface side of the arms 14c and 14d and is surrounded by the outer peripheral frame part 17, is located nearer to an upper surface side of the arms 14c and 14d than the BOX layer silicon oxide film 43. |
