| 摘要 |
PROBLEM TO BE SOLVED: To facilitate operation of packing and transportation of a load port device.SOLUTION: A load port device is constituted of an upper structure having an opening, and a lower structure having a door capable of closing the opening, a door drive source, a placement table capable of placing a pod by being made to face the opening, and a frame structure for supporting the door drive source and the placement table. The upper structure is fixed to the lower structure so as to be separable. |
