| 摘要 |
A substrate inspecting apparatus comprises: a light source which emits light; a light concentrating lens which is installed at the front-end of the light source in order to concentrate the light emitted from the light source on one spot; a beam splitter which is installed at the front-end of the light concentrating lens in order to reflect the light concentrated by the light concentrating lens to a substrate placed on the bottom, and transmits the light reflected by the substrate; a focus light source shielding screen which is installed on the top of the beam splitter, has a transparent place shape, and where a shielding film is formed in a focus area of the light reflected by a flat area on the substrate; and a CCD camera which photographs images of the focus light source shielding screen. The substrate inspecting apparatus shields light reflected after being radiated to not a defect part but a flat area on a substrate, but photographs light scattered or reflected by the defect part with a camera after being radiated to an area where the defect part of the substrate exists. Therefore, the substrate inspecting apparatus can accurately detect a defect on a substrate by clearly distinguishing light and shade between an area having a defect part on a substrate and a flat area without a defect part. |
