发明名称 VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD, ORGANIC EL DISPLAY, AND ORGANIC EL LIGHTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus capable of enhancing the using efficiency of an organic material.SOLUTION: A vapor deposition apparatus 2 comprises: a first vapor deposition portion for injecting a gas containing a host material toward a treated face of a moving substrate G, to vapor-deposit an organic film on the treatment surface of the substrate G; and a second vapor deposition portion arranged at a front stage or a back stage of a first vapor deposition portion, for injecting a gas containing a quest material toward the treated surface of the moving substrate G so that the organic film is vapor-deposited in a line shape on the treated surface of the substrate G.
申请公布号 JP2014047416(A) 申请公布日期 2014.03.17
申请号 JP20120193573 申请日期 2012.09.03
申请人 TOKYO ELECTRON LTD;KYUSHU UNIV 发明人 EOMO TOMOHIKO;TSUGITA KOHEI;ADACHI CHIHAYA
分类号 C23C14/24;H01L51/50;H05B33/10 主分类号 C23C14/24
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