发明名称 |
VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD, ORGANIC EL DISPLAY, AND ORGANIC EL LIGHTING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus capable of enhancing the using efficiency of an organic material.SOLUTION: A vapor deposition apparatus 2 comprises: a first vapor deposition portion for injecting a gas containing a host material toward a treated face of a moving substrate G, to vapor-deposit an organic film on the treatment surface of the substrate G; and a second vapor deposition portion arranged at a front stage or a back stage of a first vapor deposition portion, for injecting a gas containing a quest material toward the treated surface of the moving substrate G so that the organic film is vapor-deposited in a line shape on the treated surface of the substrate G. |
申请公布号 |
JP2014047416(A) |
申请公布日期 |
2014.03.17 |
申请号 |
JP20120193573 |
申请日期 |
2012.09.03 |
申请人 |
TOKYO ELECTRON LTD;KYUSHU UNIV |
发明人 |
EOMO TOMOHIKO;TSUGITA KOHEI;ADACHI CHIHAYA |
分类号 |
C23C14/24;H01L51/50;H05B33/10 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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