| 摘要 |
The present invention relates to an inspection apparatus, a stage used therefor, and an inspection method using the same, capable of making a uniform amount of radiation passing through the stage during an inspection of inspected bodies by oblique CT. The inspection apparatus according to the present invention comprises: a stage for the inspected body to be secured; a radiation irradiating unit to irradiate radiation having a prescribed incident angle from the lower part of the stage; a radiation detecting unit installed in the upper part of the stage to face the radiation irradiating unit to detect radiation passing through the stage and the inspected body; and a control unit to generate 3-dimensional tomography of the inspected body based on the detected radiation. The stage is provided with an upper face, on which the inspected body is secured, and a curved face part wherein a distance for radiation to pass through the stage is logarithmically and inversely proportional to the amount of radiation passing through the stage. [Reference numerals] (AA) Y-axis; (BB) Axis of rotation; (CC) X-axis; (DD) Curved face part |
