| 摘要 |
PROBLEM TO BE SOLVED: To make it hard to be influenced by vibration from the outside when a sample in a state where voltage is applied is observed using a sample holder to hold an electronic component as a sample.SOLUTION: Observation is performed using a sample holder 10 which includes a substrate 11 for fixing a sample 13, a power supply source for applying voltage to a plurality of conductors of the sample 13, and wiring 12 for electrically connecting the plurality of conductors and the power supply source. The power supply source is provided in the sample holder 10 itself without being installed in the outside of a microscope. |
