| 摘要 |
PURPOSE: An electrode frame and a charged particle beam generating device including the same are provided to easily implement a changing operation by mounting an electrode pole at the electrode frame in a direction crossing at right angles. CONSTITUTION: An electrode frame(2) comprises an electrode for extracting a charged particle beam. The electrode frame comprises an opening part(3). The charged particle beam passes through the opening part. An electrode pole supporting part is formed at a peripheral part of the opening part. Both ends of an electrode pole(5) are supported at the electrode pole supporting part. The electrode pole is arranged through the opening part. |
