发明名称 |
ELECTRON BEAM IRRADIATOR FOR TRANSFERING VACUUM MODE |
摘要 |
An electron beam irradiator for transferring a vacuum mode according to an embodiment of the present invention includes: a chamber having a space in where a sample is mounted and in which a column with a structure that is in communication with the space is installed; a first pump connected to the chamber to suck air in the chamber until the internal pressure in the chamber becomes high vacuum pressure; a second pump connected to the chamber and the first pump to suck air therein until the internal pressure therein becomes low vacuum pressure; and a valve part installed in the chamber and connected to the first pump and the second pump to open and close a first flow path for the air from the chamber to the first pump and a second flow path for the air from the chamber to the second pump. |
申请公布号 |
KR20140032026(A) |
申请公布日期 |
2014.03.14 |
申请号 |
KR20120097121 |
申请日期 |
2012.09.03 |
申请人 |
PEMTRON CO., LTD. |
发明人 |
CHO, CHEOL HOON;YU, GIL YEON;AHN, TAE WON;BACK, YANG SUN |
分类号 |
H01J37/06;H01J37/18;H01J37/22 |
主分类号 |
H01J37/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|