LASER DEVICE AND METHOD FOR CONTROLLING LASER DEVICE

摘要

[Problem] To accurately determine the life of an optical element of a laser device. [Solution] A laser device may be provided with: a laser chamber in which a laser gain medium is put; a pair of electrodes provided in the laser chamber; an energy detector for measuring the pulse energy of laser light emitted by discharging electricity between the pair of electrodes; an optical element installed in the light path of the laser light; and a control unit for calculating the integrated value of absorbed energy in the optical element on the basis of the pulse energy of the laser light, and determining whether or not the integrated value of the absorbed energy in the optical element exceeds the life integrated value of the optical element.