| 摘要 |
A system for reel-to-reel deposition of material onto flexible materials includes a reaction chamber, a feed reel arranged in the reaction chamber, the feed reel configured to support at least one continuous length of flexible material, a receiving reel arranged in the reaction chamber separate from the feed reel, the receiving reel configured to receive the flexible material, and at least one deposition target arranged in the reaction chamber, the deposition target configured to release vaporized target material for deposition onto surfaces of the flexible material. |
