| 摘要 |
PURPOSE: A substrate inspecting device is provided to prevent a Fresnel lens from being polluted as a cover of a light-transmissive material is covered on the Fresnel lens which is a light collecting member. CONSTITUTION: A substrate inspecting device includes a substrate holder (30), a light source (41), a light collection member (43), and a light collection member cover (50). A target substrate (S) is placed on the substrate holder. The light source provides lights for a macro inspection of the target substrate placed on the substrate holder. The lights forward the substrate from the light source are transmitted through the light collection member. The light collection member cover is covered on one or more surfaces of both surfaces of the light collection member in which the lights are transmitted for avoiding foreign materials. A part or the whole of light collection member cover is formed into a light-transmissive material for enabling the transmission of the light to the substrate. |
