Device for supporting optical device in lithography system, has additional control elements that are connected with auxiliary mass in force-transmitting manner for active attenuation of flexible modes of optical device

摘要

The supporting device (1) has retroactive reference control elements which are connected with reference frame in a force-transmitting manner. The additional control elements such as inertial actuator (8) and inertial sensor (11) are connected with an auxiliary mass (7) in a force-transmitting manner for active attenuation of flexible modes of optical device (2).