发明名称 |
MASS TRANSFER TOOL |
摘要 |
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool includes an articulating transfer head assembly, a carrier substrate holder, and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder. The articulating transfer head assembly may include an electrostatic voltage source connection and a substrate supporting an array of electrostatic transfer heads. |
申请公布号 |
WO2014039335(A1) |
申请公布日期 |
2014.03.13 |
申请号 |
WO2013US56912 |
申请日期 |
2013.08.27 |
申请人 |
LUXVUE TECHNOLOGY CORPORATION |
发明人 |
HIGGINSON, JOHN, A.;BIBL, ANDREAS;ALBERTALLI, DAVID |
分类号 |
H01L21/677;B25J9/04;B65G49/07;H01L21/68 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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