DC POWER SUPPLY DEVICE, AND CONTROL METHOD FOR DC POWER SUPPLY DEVICE

摘要

During restarting, the fluctuation of output voltage of each phase of an inverter and the fluctuation of voltage supplied to a load are inhibited by matching the phase of a pulse control signal when restarting and the phase of a pulse control signal during suspension. When supplying DC power to a plasma generation device, when arc discharge is generated in the plasma generation device, the supply of DC power is suspended to reduce damage to electrodes and substrates, and, when the arc discharge has extinguished, the supply of DC power is restarted. When suspending/restarting the DC output, the current flowing in the chopper is maintained as a circulating current during suspension, and this circulating current is supplied to the load when an inverter is restarted, thereby reducing the delay in the supply of the DC power to the load when restarting the DC output.