| 摘要 |
A slit m is projected onto an object surface in which reference point X1 is in a horizontal axis x closest to best in focus position P. One image of a field of view area F is acquired after reflection of light comprising said reference point X1. Position Z1 of the object in a vertical axis z is determined. Images of respective field of view areas F are acquired after reflection of light having reference points X2, X3 . . . Xn by simultaneously moving the object along axis z to maintain reference points X2, X3 . . . Xn closest to best in focus position P. Positions Z2, Z3 . . . Zn in which images were acquired are determined. The best in focus position P along horizontal axis x is determined for each image. A correction differential Delta1, Delta2 . . . Deltan between best in focus position P and reference points X1, X2 . . . Xn is calculated. |
